发明名称 |
Method for automatic organisation of microstructures or nanostructures and related device obtained |
摘要 |
The invention relates to a device comprising microstructures or nanostructures on a support, characterized in that the support comprises: a) a substrate (1) comprising at least one part composed of a crystalline material, this part having a surface (2) with a stress field or a topology associated with a stress field, the stress field being associated with dislocations, b) an intermediate layer (3) bonded to the surface (2), and having a thickness and/or composition and/or a surface state enabling transmission of said stress field through this layer as far as its free face that supports microstructures or nanostructures (4).
|
申请公布号 |
US2003186512(A1) |
申请公布日期 |
2003.10.02 |
申请号 |
US20030381212 |
申请日期 |
2003.03.28 |
申请人 |
SEMERIA MARIE-NO?EUML,LLE;MUR PIERRE;FOURNEL FRANCK;MORICEAU HUBERT;EYMERY J?OUML,EL;MAGNEA N?OUML,EL;BARON THIERRY;MARTIN FRANCOIS |
发明人 |
SEMERIA MARIE-NO?EUML,LLE;MUR PIERRE;FOURNEL FRANCK;MORICEAU HUBERT;EYMERY J?OUML,EL;MAGNEA N?OUML,EL;BARON THIERRY;MARTIN FRANCOIS |
分类号 |
C23C14/02;C23C16/02;C30B25/02;(IPC1-7):H01L21/30;H01L21/46 |
主分类号 |
C23C14/02 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|