发明名称 Method for automatic organisation of microstructures or nanostructures and related device obtained
摘要 The invention relates to a device comprising microstructures or nanostructures on a support, characterized in that the support comprises: a) a substrate (1) comprising at least one part composed of a crystalline material, this part having a surface (2) with a stress field or a topology associated with a stress field, the stress field being associated with dislocations, b) an intermediate layer (3) bonded to the surface (2), and having a thickness and/or composition and/or a surface state enabling transmission of said stress field through this layer as far as its free face that supports microstructures or nanostructures (4).
申请公布号 US2003186512(A1) 申请公布日期 2003.10.02
申请号 US20030381212 申请日期 2003.03.28
申请人 SEMERIA MARIE-NO?EUML,LLE;MUR PIERRE;FOURNEL FRANCK;MORICEAU HUBERT;EYMERY J?OUML,EL;MAGNEA N?OUML,EL;BARON THIERRY;MARTIN FRANCOIS 发明人 SEMERIA MARIE-NO?EUML,LLE;MUR PIERRE;FOURNEL FRANCK;MORICEAU HUBERT;EYMERY J?OUML,EL;MAGNEA N?OUML,EL;BARON THIERRY;MARTIN FRANCOIS
分类号 C23C14/02;C23C16/02;C30B25/02;(IPC1-7):H01L21/30;H01L21/46 主分类号 C23C14/02
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