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发明名称
PLASMA PROCESSING DEVICE
摘要
申请公布号
EP0723386(A4)
申请公布日期
1997.01.29
申请号
EP19950925123
申请日期
1995.07.13
申请人
SUMITOMO METAL INDUSTRIES, LTD.
发明人
MABUCHI, HIROSHI;YOSHIKI, TAKAHIRO;MATSUMOTO, NAOKI;KOMACHI, KYOICHI;KANAYAMA, SYUTA;EBATA, TOSHIKI
分类号
H01J37/32;(IPC1-7):H05H1/46
主分类号
H01J37/32
代理机构
代理人
主权项
地址
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