METHOD FOR TRANSFERRING ELEMENTS BETWEEN SUBSTRATES
摘要
The invention concerns a method for transferring at least an element from a donor substrate to a target substrate (40). The invention is characterized in that it consists in securing the element to a handle-substrate via a bonding layer (32) capable of degradation and in producing a degradation of the bonding layer during a step which consists in releasing the element to be transferred. The invention is applicable to the transfer of components.
申请公布号
WO03081664(A2)
申请公布日期
2003.10.02
申请号
WO2003FR00905
申请日期
2003.03.21
申请人
COMMISSARIAT A L'ENERGIE ATOMIQUE;ASPAR, BERNARD;RAYSSAC, OLIVIER;FOURNEL, FRANCK