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发明名称
Control trimming of hard mask for transistor gate
摘要
申请公布号
GB2387028(A)
申请公布日期
2003.10.01
申请号
GB20030011301
申请日期
2001.07.26
申请人
* ADVANCED MICRO DEVICES, INC
发明人
MASSUD * AMINPUR;DAVID * WU;SCOTT * LUNING
分类号
H01L21/28;H01L21/3065;H01L21/336;H01L29/423;H01L29/49;H01L29/78;(IPC1-7):H01L21/28
主分类号
H01L21/28
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代理人
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