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发明名称
AN ADRESSING METHOD OF MOVEABLE MICROELEMENTS IN A SPATIAL LIGHT MODULATOR (SLM) FOR PATTERING OF A WORKPIECE
摘要
申请公布号
AU2003212763(A1)
申请公布日期
2003.09.29
申请号
AU20030212763
申请日期
2003.03.14
申请人
MICRONIC LASER SYSTEMS AB;FRAUNHOFER-GESELLSCHAFT ZUR FORDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
发明人
PETER DUERR;ULRIC LJUNGBLAD;TORBJORN SANDSTROM
分类号
G02B26/08;(IPC1-7):G02B26/08
主分类号
G02B26/08
代理机构
代理人
主权项
地址
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