PRECISION MACHINING DEVICE AND METHOD USING FEMTOSECOND LASER

摘要

PURPOSE: A precision machine device and method using a femtosecond laser is provided to enable to precisely measure and control and perform high precision machining better than an existing nanosecond laser and to accurately control the energy of laser beam. CONSTITUTION: A laser machining device is composed of a laser generating unit including a laser oscillator(11) for oscillating a laser(41) and a laser transmitting unit(1a) for transmitting the laser; a laser machining unit comprising a beam concentrating unit(2a) changing the direction of a laser(43) passed through the laser generating unit and focusing a laser(44) on a machining unit, an illumination source light(23) for illuminating the machining unit, and a hard packing in which the beam concentrating unit and the illumination source light are embedded; and a control unit having a stage(32) transferring processed goods(5) and a computer(33) controlling the whole processes and motions. In addition, a precision machining device using a femtosecond laser includes a concentric CCD(Charge-Coupled Device) camera installed at the upside of the hard packing to measure the machining unit on the same axis with the laser shot on the processed goods and connected with the control unit.