发明名称 MECHANISM FOR SUPPORTING/SECURING MEMBER AND INSPECTION DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a method for supporting/securing a member in which the flexure of the member can be reduced as compared with a prior art at the time of securing the member on a supporting base while positioning, and to provide a method for supporting/securing the member in which the positioning of the member, especially in the rotational direction, can be made surely with higher accuracy. SOLUTION: When a work W is not arranged on a supporting base 134, a first abutting member 138 is driven by a driving part 102a of a driving means 102 to resist against the resiliency of a resilient member 101 and separated from a second abutting member 139. When the work W is mounted on the supporting base 134, the driving part 102a moves gradually downward and a roller member 138a rotatably born to the first abutting member 138 abuts against a arcuate part W1 at the outer edge of the work W to push out the work W toward the second abutting member 139, thus positioning the work W between the first abutting member 138 and the second abutting member 139. COPYRIGHT: (C)2003,JPO
申请公布号 JP2003273198(A) 申请公布日期 2003.09.26
申请号 JP20020067724 申请日期 2002.03.12
申请人 SEIKO EPSON CORP 发明人 SUZUKI MANABU
分类号 B65G49/07;H01L21/677;H01L21/68;H01L21/683;(IPC1-7):H01L21/68 主分类号 B65G49/07
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