Vibration noise mitigation in an interferometric system

摘要

In the measurements of optical characteristics, such as measurements of group delay using an interferometric system, vibration noise can be at least partially offset by providing corrections (63) on the basis of detecting light patterns that are indicative of the vibration noise. In each embodiment, light beams propagating through first and second paths (50 and 52; 80 and 82; 112 and 114; and 134 and 136) are combined to form an interference signal, which is analyzed to provide the basis for the adjustments. <IMAGE>