| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To effectively put a batch treatment type grinder to practical use in grinding the surface of a work requiring high flatness and smoothness like a glass substrate for an electronic device used in a photomask blank. <P>SOLUTION: When a cassette K in which a plurality of works W having various thicknesses are housed is supplied to a loader charging part 21, each of the works W is obtained from the cassette K by the cooperation with a transfer device 5 or a robot hand 6 to be transferred to a plate thickness measuring part 11. The thickness of each work W is automatically measured contactlessly by an electrostatic capacity type sensor in the plate thickness measuring part 11. A control part not shown in Fig. controls the transfer device 5 or the robot hand 6 so as to classify the work W by thickness on the basis of the measuring result of the plate thickness measuring part 11 to store the same in the cassette K preliminarily arranged to an unloader part 3. <P>COPYRIGHT: (C)2003,JPO</p> |
