发明名称 Supported metal catalyst for synthesizing carbon nanotubes by low-temperature thermal chemical vapor deposition and method of synthesizing carbon nanotubes using the same
摘要 The present invention discloses a supported metal catalyst useful in synthesizing carbon nanotubes by low-temperature (<600° C.) thermal chemical vapor deposition (CVD), which contains particles of a noble metal having a diameter of 0.1-10 microns as a support and a metal catalyst deposited on the support. The metal catalyst is iron, cobalt, nickel or an alloy thereof. The weight ratio of the metal catalyst to the support ranges from 0.1:100 to 10:100. The present invention also discloses a method of synthesizing carbon nanotubes directly on a substrate by low-temperature thermal CVD, wherein the support is not needed to be removed from the substrate after growth of carbon nanotubes.
申请公布号 US2003181328(A1) 申请公布日期 2003.09.25
申请号 US20020237729 申请日期 2002.09.10
申请人 INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE 发明人 HWANG CHIEN-LIANG;TING JACK;CHIANG JIH-SHUN
分类号 B82B3/00;B01J23/89;B01J37/03;C01B31/02;C23C16/44;D01F9/127;H01J9/02;(IPC1-7):D01F9/12 主分类号 B82B3/00
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