SURFACE ACOUSTIC WAVE MODULE ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide an element structure capable of varying and stabilizing the operating frequency of a surface acoustic wave module element with high precision. SOLUTION: The element is made up of electrodes for exciting the surface acoustic waves and for reception and a surface acoustic wave propagation substrate (piezoelectric material 8), a thin film is formed to at least a part of the surface of the piezoelectric material 8 and an oxide thin film containing IV-a element to differentiate a propagation speed of the surface acoustic wave which is generated on the thin film from a propagation speed of the substrate is formed. COPYRIGHT: (C)2003,JPO