| 摘要 |
PROBLEM TO BE SOLVED: To form a group of functional elements of a high yield and high quality by reducing infinitely poor element formation because of foreign matter adhesion of dust or the like by installing a manufacturing installation of a functional element substrate in the interior of a room where an air cleaning system operates. SOLUTION: The group of functional elements is formed by injecting droplets 43 of a solution containing a functional material to adhere on the substrate 14 by an injection head 11, by volatilizing a volatile constituent in this solution, and by making solid contents remain on the above substrate. A cleaning-gas- giving head 70 is installed in a carriage with the injection head 11 being integrated into it, and while the droplet adhering areas of the substrate 14 are being made into a cleaned state by this head 70, adhering of the droplets 43 of the above solution is carried out by the above injection head 11 installed in the carriage. COPYRIGHT: (C)2003,JPO
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