PROCEDE DE FONCTIONNEMENT D'UNE MACHINE D'ANALYSE OPTIQUE DE GALETTES A MICROSTRUCTURES, MACHINE ADAPTEE,申请号FR20010002184-传众专利搜索

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发明名称	PROCEDE DE FONCTIONNEMENT D'UNE MACHINE D'ANALYSE OPTIQUE DE GALETTES A MICROSTRUCTURES, MACHINE ADAPTEE
摘要
申请公布号	FR2821206(B1)	申请公布日期	2003.09.19
申请号	FR20010002184	申请日期	2001.02.16
申请人	JOBIN YVON S.A.	发明人	BENFERHAT RAMDANE
分类号	H01L21/00;H01L21/677;(IPC1-7):H01L21/66;G01N21/84;G01N35/00	主分类号	H01L21/00
代理机构		代理人
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