| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection apparatus that can inspect an object for three-dimensional shape at a high speed. SOLUTION: This inspection apparatus 1 which inspects the object 9 for three-dimensional shape is provided with a stage 2 for holding the object 9, two slit light emitting sections 31 which respectively emit slit light rays toward the stage 2 from different directions, and a TDI line camera 32 which picks up the image of the object 9 put on the stage 2. This apparatus 1 is also provided with a stage driving section 21 which moves the stage 2. Since the image of the object 9 is picked up by synchronizing the image picking-up motion of the camera 32 with the object moving operation by means of the stage driving section 21, an image containing three-dimensional information can be acquired at a high speed. In addition, the object 9 can be inspected for three- dimensional shape at a high speed by comparing the acquired image with a reference image. COPYRIGHT: (C)2003,JPO
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