METHODS AND APPARATUS FOR FORMING SUBMICRON PATTERNS ON FILMS,申请号KR20027008171-传众专利搜索

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发明名称	METHODS AND APPARATUS FOR FORMING SUBMICRON PATTERNS ON FILMS
摘要
申请公布号	KR100675074(B1)	申请公布日期	2007.01.29
申请号	KR20027008171	申请日期	2002.06.22
申请人		发明人
分类号	H01L21/027	主分类号	H01L21/027
代理机构		代理人
主权项
地址

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