发明名称 PRESSURE VESSEL SYSTEMS AND METHODS FOR DISPENSING LIQUID CHEMICAL COMPOSITIONS
摘要 <p>Apparatus and processes are presented to contact a dry, preferably high purity inert gas with a chemical composition in a pressure vessel, or a wetting composition, to form a wet inert gas, which is then used to pressurize the chemical composition out of the pressure vessel. No additional space is needed for an external humidifier. Since a very small amount of vapor is needed to form a wet inert gas, the composition of chemical composition will not be significantly affected.</p>
申请公布号 KR20030074742(A) 申请公布日期 2003.09.19
申请号 KR20037009872 申请日期 2003.07.25
申请人 发明人
分类号 H01L21/304;B24B37/04;B24B57/02;C12N15/12;F04F1/06 主分类号 H01L21/304
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