| 发明名称 |
STRUCTURE MULTICOUCHE MINCE, PIECE LA COMPRENANT ET SON PROCEDE DE DEPOT |
| 摘要 |
<p>The invention relates to a corrosion-resistant thin-film multilayer structure having a low wear rate and a low coefficient of friction, comprising 1 to 1000 periods, one period comprising 2 to 100 layers (A, B) based on carbon, silicon and hydrogen, and optionally a functional surface layer (FSL). The invention also relates to a component comprising the thin-film multilayer structure and to its method of deposition.</p> |
| 申请公布号 |
FR2896807(B1) |
申请公布日期 |
2008.03.14 |
| 申请号 |
FR20060000829 |
申请日期 |
2006.01.30 |
| 申请人 |
EADS CCR GROUPEMENT D'INTERET ECONOMIQUE GROUPEMENT D'INTERET ECONOMIQUE |
发明人 |
LUCAS VALERIE;JOINET MICKAEL;TEYSSANDIER FRANCIS;THOMAS LAURENT |
| 分类号 |
C23C16/30;C23C16/02;C23C16/22;C23C16/50;C23C28/00 |
主分类号 |
C23C16/30 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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