METHOD OF CONNECTING ELECTRODE, NARROW PITCH CONNECTOR, PITCH CHANGING DEVICE, MICROMACHINE, PIEZOELECTRIC ACTUATOR, ELECTROSTATIC ACTUATOR, INK-JET HEAD, INK-JET PRINTER, LIQUID CRYSTAL DEVICE, AND ELECTRONIC DEVICE

摘要

An electrode connecting method, a narrow-pitch connector, a pitch converter, a micro-machine, a piezoelectric actuator, an electrostatic actuator, an ink jet head, an ink jet printer, a liquid crystal device and electronic equipment, in which even if connecting subjects having different thermal expansion coefficients are connected with each other, the positional deviation between the terminal electrodes of the connecting subjects can be restrained.After terminal electrodes (28) of a connecting subject (26) are put on top of terminal electrodes (30) of a narrow-pitch connector (20), thermal compression bonding is performed on these terminal electrodes so that the terminal electrodes are connected with each other. A temperature difference between the connecting subject (26) and the narrow-pitch connector (20) is established so that the pitch of the terminal electrodes (28) provided on the connecting subject (26) and the pitch of the terminal electrodes (30) on the connector become equal to each other at the time of heating. Thus, the connection is performed. If a substrate (22) and the connecting subject (26) are formed of silicon, precise connection can be achieved.