发明名称 |
Integrated optoelectronic thin-film sensor and method of producing same |
摘要 |
A measuring system that includes a scale and a transparent substrate located opposite the scale. The transparent includes a graduation structure and a semiconductor layer arranged on a first side of the transparent substrate facing away from the scale, wherein a photodetector, a light source and an electronic circuit are integrated into the semiconductor layer.
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申请公布号 |
US6621104(B1) |
申请公布日期 |
2003.09.16 |
申请号 |
US20020959357 |
申请日期 |
2002.02.15 |
申请人 |
DR. JOHANNES HEIDENHAIN GMBH |
发明人 |
SPECKBACHER PETER;MICHEL DIETER |
分类号 |
B81B3/00;B81C1/00;G01D5/347;G02B5/18;H01L27/144;H01L31/12;H01L31/16;(IPC1-7):H01L27/15 |
主分类号 |
B81B3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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