发明名称 Integrated optoelectronic thin-film sensor and method of producing same
摘要 A measuring system that includes a scale and a transparent substrate located opposite the scale. The transparent includes a graduation structure and a semiconductor layer arranged on a first side of the transparent substrate facing away from the scale, wherein a photodetector, a light source and an electronic circuit are integrated into the semiconductor layer.
申请公布号 US6621104(B1) 申请公布日期 2003.09.16
申请号 US20020959357 申请日期 2002.02.15
申请人 DR. JOHANNES HEIDENHAIN GMBH 发明人 SPECKBACHER PETER;MICHEL DIETER
分类号 B81B3/00;B81C1/00;G01D5/347;G02B5/18;H01L27/144;H01L31/12;H01L31/16;(IPC1-7):H01L27/15 主分类号 B81B3/00
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