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发明名称
DIFFRACTION SPECTRAL FILTER FOR USE IN EXTREME-UV LITHOGRAPHY CONDENSER
摘要
申请公布号
KR20030072319(A)
申请公布日期
2003.09.13
申请号
KR20037001587
申请日期
2003.02.04
申请人
发明人
分类号
G02B5/18;G02B5/20;G02B27/30;G03F7/20;G21K1/06;H01L21/027
主分类号
G02B5/18
代理机构
代理人
主权项
地址
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