| 摘要 |
<p>A pedestal (3) for mounting semiconductor fabrication equipment (4) within a clean room. The pedestal includes a base frame (3a) sitting on a waffle slab (2) and utility connections (5). The equipment can readily be connected to the utility connections when positioned on the pedestal. The utility connections are located at the periphery of or across part of a face of the pedestal to thereby define a service area within the periphery.</p> |
