| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide the manufacturing method of constituents improved in the adhesion of a noble metal layer to an insulation layer. <P>SOLUTION: The method for improving adhesion between the noble metal layer (28) and the insulation layer (34) is proposed. In this method, a silicon layer is provided between the noble metal layer (28) and the insulation layer (34). The silicon layer is salicided and oxidized by applying heat treatment in an atmosphere where oxygen is present. In this case, an oxidized silicon layer (30'), effecting strong mixture of the noble metal and the formed oxide, is produced. Adhesion of the noble metal layer (28) to the insulation layer (34) is improved, based on a comparatively large internal surface acquired by this method. <P>COPYRIGHT: (C)2003,JPO |
