| 摘要 |
PROBLEM TO BE SOLVED: To provide an anti-reflection coat layer that has a high refraction factor and a function of preventing damage by chipping, and a low reflection factor. SOLUTION: The anti-reflection coat layer has a structure of four layers and the first layer, which is furthest in order from the substrate, is a transparent conductive surface layer and has a refraction factor of 1.9-2.1 when the wavelength is 520-550 nm, and the thickness of the first layer is 10-40 nm. And the second layer is an oxide layer and has a refraction factor of 1.45-1.50 when the wavelength is 520-550 nm and the thickness of the second layer is 30-60 nm, and the third layer is an oxide layer and has a refraction factor of 2.1-2.3 when the wavelength is 520-550 nm and the thickness of the third layer is 30-80 nm. And the fourth layer is an oxide layer and has a refraction factor of 1.9-2.1 when the wavelength is 520-550 and the thickness of the fourth layer is 40-80 nm. COPYRIGHT: (C)2003,JPO
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