| 发明名称 |
A METHOD FOR THE WET TREATMENT OF DISK-LIKE OBJECTS |
| 摘要 |
The invention relates to a method for the treatment of disk-like objects with one first liquid and at least one second liquid at least in a defined edge region of a disk-like object.
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| 申请公布号 |
WO03075324(A1) |
申请公布日期 |
2003.09.12 |
| 申请号 |
WO2003EP01568 |
申请日期 |
2003.02.17 |
| 申请人 |
SEZ AG;SAX, HARRY |
发明人 |
SAX, HARRY |
| 分类号 |
H01L21/306;H01L21/00;(IPC1-7):H01L21/00 |
主分类号 |
H01L21/306 |
| 代理机构 |
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