| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a thin film solar battery having a high conversion efficiency by increasing the output voltage and suppressing reduction of the output current, and to provide a manufacturing method thereof. <P>SOLUTION: In the thin film solar battery including at least one pin junction formed by laminating a p-type semiconductor layer (a p-layer) 7 of microcrystalline silicon, an essential intrinsic i-type semiconductor layer (an i-layer) 5 of microcrystalline silicon or polysilicon, and an n-type semiconductor layer (an n-layer) 4 of microcrystalline silicon or polysilicon; an interstitial layer 6 of microcrystalline silicon including not less than 1×10<SP>20</SP>atom/cm<SP>3</SP>impurities which broadens a bandgap of an amorphous silicon component, is arranged between the semiconductor layer (the p-layer) on the light incident side of the i-layer and the i-layer. A crystal fraction of this interstitial layer 6 is set to be smaller than that of the semiconductor layer (the p-layer) on the light incident side of the i-layer 5. In the manufacturing method, the crystal fraction of the interstitial layer is controlled so as to decrease by increasing the impurities. <P>COPYRIGHT: (C)2003,JPO</p> |
