| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a manufacturing method for an optical waveguide capable of reducing distorsion produced in a target to prevent occurrence of any crack, and of increasing a film formation rate of a core film to improve productivity. <P>SOLUTION: A manufacturing method for an optical waveguide comprises; forming a phosphate glass core film doped with an element providing an optical amplification with a sputtering method on a flat substrate 8; forming a rectangular cross section core by etching the core film; and forming a clad film to cover the core. In the method, used is a sputtering target 10 obtained by mixing P<SB>2</SB>O<SB>5</SB>fine powder and a rear earth element, forming the mixture into a predetermined shape, and then sintering the body to provide the bulk density of 60 to 95%. <P>COPYRIGHT: (C)2003,JPO</p> |
