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发明名称	SUBSTRATE PROCESSING SYSTEM AND METHOD
摘要
申请公布号	KR100906268(B1)	申请公布日期	2009.07.06
申请号	KR20080066792	申请日期	2008.07.10
申请人		发明人
分类号	H01L21/02;H01L21/683	主分类号	H01L21/02
代理机构		代理人
主权项
地址

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