发明名称 Elongated thermal physical vapor deposition source with plural apertures for making an organic light-emitting device
摘要 An elongated thermal physical vapor deposition source for vaporizing organic materials in forming an OLED on a structure includes an elongated container for receiving vaporizable organic material, and an elongated vaporization heater sealingly disposed over the container. The vaporization heater includes a plurality of vapor efflux apertures formed along an elongated direction of the heater, and arranged to provide improved uniformity of vapor efflux of vaporized organic material along the elongated direction of the source.
申请公布号 US2003168013(A1) 申请公布日期 2003.09.11
申请号 US20020093739 申请日期 2002.03.08
申请人 EASTMAN KODAK COMPANY 发明人 FREEMAN DENNIS R.;REDDEN NEIL;VAN SLYKE STEVEN A.
分类号 H05B33/10;C23C14/12;C23C14/24;H01L51/30;H01L51/40;H01L51/50;H01L51/56;(IPC1-7):C23C16/00 主分类号 H05B33/10
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