Separating a connection between disk-shaped objects comprises placing the disk-shaped objects in a separating unit, introducing a gaseous separating agent, and carrying out condensation-induced releasing of the connection

摘要

Separating a connection between disk-shaped objects (6) comprises placing the disk-shaped objects in a separating unit (2), introducing a gaseous separating agent (3) into the separating unit, and carrying out condensation-induced releasing of the connection to at least partly separate the disk-shaped objects. Independent claims are also included for: (a) alternative process for separating a connection between disk-shaped objects; and (b) device used for carrying out the above process. Preferred Features: The separating agent is hydrofluoric acid. The connection is an oxidic connection. The disk-shaped object is a product or support wafer.