DIFFERENTIAL HOT WIRE AIR GAUGE,申请号EP19980918028-传众专利搜索

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发明名称	DIFFERENTIAL HOT WIRE AIR GAUGE
摘要
申请公布号	EP0907876(B1)	申请公布日期	2003.09.10
申请号	EP19980918028	申请日期	1998.04.10
申请人	APPLIED MATERIALS, INC.	发明人	THOMAS, TIMOTHY, N.;MIRRO, EUGENE, JR.
分类号	G01B13/00;G01B13/02;G01F1/684;G01F1/69;G01P5/12;(IPC1-7):G01B13/12	主分类号	G01B13/00
代理机构		代理人
主权项
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