| 摘要 |
PROBLEM TO BE SOLVED: To perform optical processing, such as optical machining, optical stimulating and thermal stimulating, of a microregion by irradiation with light in nanometer order below the diffraction threshold of the light. SOLUTION: A tapered optical fiber probe (14) comprising sharpening a core (12a) segment of a light exit end (12out) of an optical fiber (12) to a conical shape and forming a metallic coating film (14a) on a tapered surface (12c) exclusive of its apex (12b) is positioned to an arbitrary processing position under the visual field of a microscope (2). The microregion of a workpiece (W) is irradiated with the proximity field light leaking from the apex (12b) and the arbitrary optical processing is performed by the light energy thereof. COPYRIGHT: (C)2003,JPO
|
