METHOD FOR FORMING CONTACT HOLE,申请号JP19970174428-传众专利搜索

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发明名称	METHOD FOR FORMING CONTACT HOLE
摘要
申请公布号	JPH10275856(A)	申请公布日期	1998.10.13
申请号	JP19970174428	申请日期	1997.06.30
申请人	SONY CORP	发明人	MIZUMURA AKIRA
分类号	H01L21/768;(IPC1-7):H01L21/768	主分类号	H01L21/768
代理机构		代理人
主权项
地址

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