| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an X-ray measuring device for accurately measuring even in the case where a thin film or the like formed on the free liquid surface is a measuring object. <P>SOLUTION: This X-ray measuring device 1 has a sample stage 3 and a measuring device body 4 installed independently on a measuring table 2. The measuring device body 4 is constituted from a first rotating table 21 and a second rotating table 22 rotating mutually independently around a first axis H in the vertical direction passing through a sample M supported on the sample stage, a first turntable 23 supported by the first rotating table for rotating around a second axis V1 passing through the surface of the sample and perpendicular to the first axis, a second turntable 24 supported by the second rotating table for rotating around a third axis V2 passing through the surface of the sample and perpendicular to the first axis, an X-ray source 26 provided on the first turntable, for irradiating the X-ray toward one point O on the sample surface where the first axis, the second axis and the third axis are intersected with one another, and an X-ray detector 28 provided on the second turntable, for detecting a diffracted X-ray or a reflected X-ray from the point O. <P>COPYRIGHT: (C)2003,JPO</p> |
