| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and a device for grasping a relative position between a pair of X-ray generator and a camera recognizing the X-ray image for measuring the position of a specimen. SOLUTION: Using the pair of X-ray generator 1 and a camera 2 recognizing the X-ray image, the position of a specimen 3 is measured, however, an accurate position of the specimen 3 cannot be measured because of a shift due to heat from an X-ray generation source 8 inside the X-ray generator 1. A recognition mark 12 in a known relative position from the camera 2 recognizing the X-ray image is arranged, and its position is measured by means of a pair of X-ray generators 1 and the camera 2 recognizing the X-ray image, and according to a difference from the known position, a shift quantity of the X-ray generation source 8 inside the X-ray generator 1 is measured for correcting the specimen 3 position measurement value with a deflection of a measurement value due to movement of the X-ray generation source 8 inside the X-ray generator 1. In this way, a relative position between a pair of X-ray generators and the camera recognizing the X-ray image is grasped for position measurement of the specimen. COPYRIGHT: (C)2003,JPO
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