COMPOUND OF ALKYL METAL OF VA GROUP

摘要

PROBLEM TO BE SOLVED: To obtain a new compound of a monoalkyl metal of the fifth A group suitable for a precursor-producing intermediate for chemical vapor deposit. SOLUTION: The dihalogenated compound of the momoalkyl metal of the fifth A group is synthesized by reacting a reaction agent selected from a group consisting of an alkyl lithium compound and a compound expressed by RnM1X3-n(wherein R expresses a 1-10C alkyl or the like; M1expresses a metal of the third A group; X expresses a halogen; n expresses 1-3 integer) with a trihalogen compound of the metal of the fifth A group in an organic solvent without substituted with oxygen. COPYRIGHT: (C)2003,JPO