发明名称 Method for fabrication of electromagnetic coil vanes
摘要 The present invention relates to a method of fabricating electromagnetic coil vanes. The method utilizes laser machining to provide high resolution, dense coil wire patterns on both sides of a ceramic vane substrate. A firing operation is first performed that eutectically bonds the copper to the ceramic. Laser machining is then used to produce a coil pattern in the copper. The substrate is drilled to provide a through hole which, when filled or partially filled with a conducting material, forms an electrical connection between the two coil patterns.
申请公布号 US6615481(B1) 申请公布日期 2003.09.09
申请号 US20000589399 申请日期 2000.06.08
申请人 NIKON CORPORATION 发明人 LAPLANTE MARK J.;PINCKNEY DAVID J.
分类号 G03F7/20;H01F17/00;H01F41/04;H01L21/027;H05K1/03;H05K1/16;H05K3/02;(IPC1-7):H01F7/06;B05D3/02 主分类号 G03F7/20
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