Scanning probe microscope and measuring method using same

摘要

Provided is a scanning probe microscope that takes measurements at high spatial resolution on physical information such as array structure of water molecules at a specimen-culture fluid interface in a culture fluid as well as irregularities of the surface of a specimen and composition distribution and array structure of molecules, proteins, etc. even in the atmosphere, an ambient air, vacuum, among others. The scanning probe microscope includes: a probing needle (1); a specimen holder (11) in which a specimen (3) is mounted; an oscillator (2) that produces a periodic oscillation to change the probing needle position; a pulse oscillation type laser light source (27, 28) that emits light toward a spot, which is put under measurement by the probing needle, on the specimen; a detector (25) that measures intensity of output light which is output from the specimen by energy spectroscopy; and a control device (26). The control device decreases amplitude of the periodic oscillation to change the probing needle position by the oscillator, shortens a relative distance between the probing needle and the specimen, and synchronizes shortening of the distance between the probing needle and the specimen and emission of pulse oscillation laser light, thus optimizing efficiency of tip-enhanced detection.

主权项

1. A scanning probe microscope comprising:
a probing needle; a specimen holder in which a specimen is mounted; an oscillator that produces a periodic oscillation to change the probing needle position; a pulse oscillation type laser light source that emits light toward a spot, which is put under measurement by the probing needle, on the specimen; a detector that measures intensity of output light which is output from the specimen by energy spectroscopy; a scanning mechanism that moves the specimen holder; and a control device, wherein the control device is configured to control a relative distance between the probing needle and the specimen, to synchronize shortening of the distance between the probing needle and the specimen and emission of pulse oscillation laser light, and to measure output light peaks associated with a tip enhancement effect which overlap in time with a period of decreased output light from the pulse oscillation laser lights which are blocked by the probing needle, so as to optimize efficiency of tip-enhanced detection.