| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection device that can ensure such a state of discharge in a slit die coating system as forms a coating film of a more even film thickness by inspecting a coating state in advance in a slit die system. SOLUTION: The inspection device for slit die coating, which inspects a discharge bead of a coating solution just after discharge from a slit die when the coating solution is forced out from a slit in the slit die and applied to a material to be coated, has a front observation part or a back observation part having an arrangement of an illuminator for illuminating the bead slantingly and an imaging camera for picking up an image by the illumination. COPYRIGHT: (C)2003,JPO
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