| 摘要 |
PROBLEM TO BE SOLVED: To secure further safety of an outside sealing structure while maintaining the flow capacity. SOLUTION: The outside sealing structure has a first annular projection 23 formed on the inner side surface of a peripheral edge projecting part 22 of a diaphragm 8 with the thickness W1 larger than the width W2 of a seal groove 21. In the chemical control valve, the thickness W3 of an inner wall part 41 of the seal groove 21 is increased by narrowing the width W2 of the seal groove 21, compared with the outside sealing structure of a chemical control valve of a conventional technology, without changing the sum (W3+W2) of the thickness W3 of the inner wall part 41 of the seal groove 21 and the width W2 of the seal groove 21. COPYRIGHT: (C)2003,JPO
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