| 摘要 |
PROBLEM TO BE SOLVED: To obtain an FOUP opener which makes it possible to manually or automatically open and close the FOUP door, which is a pod for housing 300 mm wafers, and is simple in structure, inexpensive, and small in occupying volume. SOLUTION: The FOUP opener is a type based on a hinged door system, wherein a door plate pivots about a rotation guide and to open. COPYRIGHT: (C)2003,JPO |
