发明名称 |
Method and apparatus for controlling a tool using a baseline control script |
摘要 |
A method for controlling a manufacturing system includes processing workpieces in a plurality of tools; initiating a baseline control script for a selected tool of the plurality of tools; providing context information for the baseline control script; determining a tool type based on the context information; selecting a control routine for the selected tool based on the tool type; and executing the control routine to generate a control action for the selected tool. A manufacturing system includes a plurality of tools adapted to process workpieces, a control execution manager, and a control executor. The control execution manager is adapted to initiate a baseline control script for a selected tool of the plurality of tools and provide context information for the baseline control script. The control executor is adapted to execute the baseline control script, determine a tool type based on the context information, select a control routine for the selected tool based on the tool type, and execute the control routine to generate a control action for the selected tool.
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申请公布号 |
US6615098(B1) |
申请公布日期 |
2003.09.02 |
申请号 |
US20010789871 |
申请日期 |
2001.02.21 |
申请人 |
ADVANCED MICRO DEVICES, INC. |
发明人 |
BODE CHRISTOPHER A.;PASADYN ALEXANDER J.;TOPRAC ANTHONY J.;OEY HEWETT JOYCE S.;PETERSON ANASTASIA OSHELSKI;SONDERMAN THOMAS J.;MILLER MICHAEL L. |
分类号 |
H01L21/02;G05B19/042;G05B19/418;(IPC1-7):G06F17/60;G06F19/00 |
主分类号 |
H01L21/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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