发明名称 Method of transforming polymer films into carbon films
摘要 A process of efficiently transforming polymer films arranged on an electron source substrate into carbon films is provided. A light is irradiated onto a region of the substrate where a plurality of polymer films, associated electrodes and part of wirings are arranged so that the plurality of polymer films are simultaneously transformed into lower resistance films such as carbon films through heating by the irradiated light, wherein for the irradiating light, a light absorptance of the wirings is lower than that of the electrodes.
申请公布号 US2003162464(A1) 申请公布日期 2003.08.28
申请号 US20030351343 申请日期 2003.01.27
申请人 CANON KABUSHIKI KAISHA 发明人 KYOGAKU MASAFUMI;MIZUNO HIRONOBU
分类号 H01J9/00;H01J9/02;H01J31/00;(IPC1-7):H01J9/00 主分类号 H01J9/00
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