发明名称 Probe card, and testing apparatus having the same
摘要 Multiple probe needles are arranged to be brought into contact with one electrode pad with a probe card, the multiple probe needles are connected in parallel with the same potential, and configured so that the amount of current flowing through the probe needles is at least halved, thereby decreasing generation of heat from Joule heat, and preventing melting of aluminum of which the electrode pads are composed. Consequently, a probe card can be provided wherein adhesion of molten material to the probe needles is suppressed, and wherein increased contact resistance due to oxidization of the material which has melted and adhered is prevented.
申请公布号 US2003160624(A1) 申请公布日期 2003.08.28
申请号 US20020080582 申请日期 2002.02.25
申请人 TAKEMOTO MEGUMI;MAEKAWA SHIGEKI;KASHIBA YOSHIHIRO;WATANABE YUETSU 发明人 TAKEMOTO MEGUMI;MAEKAWA SHIGEKI;KASHIBA YOSHIHIRO;WATANABE YUETSU
分类号 G01R31/26;G01R1/067;G01R1/073;H01L21/66;(IPC1-7):G01R31/02 主分类号 G01R31/26
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