| 摘要 |
PROBLEM TO BE SOLVED: To provide a gas supply facility, a leakage inspection method, and a gas supply method, capable of substantially shortening the time required for leakage test upon starting up of the gas supply facility and upon replacing of gas container, and quickly surely conducting gas supply. SOLUTION: Leakage or no leakage in a gas supply line is determined by introducing gas in the gas supply line which is a leakage test object among a plurality of gas supply lines into an analyzer, varying the flow rate and pressure of gas flowing through the gas supply line, and measuring the concentration of impurities in the gas. When determined as no leakage, actual gas of supply target is supplied to the gas supply line, the concentration of the impurities in the actual gas is measured with the analyzer, and in a point of time when the amount of the impurities is less than the reference value, the supply of the actual gas to a gas consuming facility starts. COPYRIGHT: (C)2003,JPO
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