发明名称 LAMINATED PROBE ASSEMBLY DEVICE, LAMINATED PROBE ASSEMBLY METHOD, LAMINATED PROBE AND PROBE CARD
摘要 PROBLEM TO BE SOLVED: To reduce a cost for a laminated probe or the like. SOLUTION: This laminated probe B is manufactured by using this laminated probe assembly device A. The laminated probe assembly device A is equipped with probe spacers 20 on which a notch 21 for inserting and holding a blade probe 10 and a through hole 22 are formed respectively, interval spacers 30 on which a notch 31 having a smaller size compared with the notch 21 of the probe spacer 20 and a through hole 32 are formed respectively, penetrating bars 72 penetrating respectively through holes 15 and the notch 31 in the state where the probe spacers 20 and the interval spacers 30 are laminated plurally, penetrating bars 73 penetrating respectively the through holes 22 and the through holes 32 in the state where the probe spacers 20 and the interval spacers 30 are laminated plurally, and fixing plates 60 for fixing the probe spacers 20 and the interval spacers 30 laminated plurally from the both sides. COPYRIGHT: (C)2003,JPO
申请公布号 JP2003232807(A) 申请公布日期 2003.08.22
申请号 JP20020030159 申请日期 2002.02.06
申请人 JAPAN ELECTRONIC MATERIALS CORP 发明人 OKUBO MASAO;BUN HIKARICHIYU
分类号 G01R1/073;H01L21/66;(IPC1-7):G01R1/073 主分类号 G01R1/073
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