| 发明名称 |
Method for the removing of adsorbed molecules from a chamber |
| 摘要 |
A method of removing first molecules adsorbed on the surfaces of a chamber and/or at least one object found in the chamber is provided. Second, polar molecules that have a desorptive effect on the first molecules are introduced into the chamber. The second molecules comprise nitrogen and hydrogen, and especially NH3 molecules.
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| 申请公布号 |
US2003155000(A1) |
申请公布日期 |
2003.08.21 |
| 申请号 |
US20020220001 |
申请日期 |
2002.09.25 |
| 申请人 |
NENYEI ZSOLT;LERCH WILFRIED;NIESS JURGEN;GRAF THOMAS |
发明人 |
NENYEI ZSOLT;LERCH WILFRIED;NIESS JURGEN;GRAF THOMAS |
| 分类号 |
C23C16/44;C23C14/56;H01L21/00;H01L21/205;H01L21/324;(IPC1-7):B08B9/00 |
主分类号 |
C23C16/44 |
| 代理机构 |
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