| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser beam processing apparatus in which an operating distance is long, maintenance and inspection are easy and a hole can be vertically formed. <P>SOLUTION: The laser beam processing apparatus comprises a relay optical system 15 having a lens 16 and a lens 17 and disposed between a mirror 9 of a deflecting means of a direction Y and a processing lens 18 so that an intermediate point K of the mirror 5 and the mirror 9 of the deflecting means of a direction X of a laser beam is focused at a front side focus f<SB>f</SB>of the lens 18. Thus, since the focus f<SB>f</SB>of the lens 18 can be disposed near the lens 18 or therein, a position of a rear side focus f<SB>f</SB>can be separated from a lens 32. Further, since a deflection point of the laser beam can be disposed at the front side focus f<SB>f</SB>of the lens 18, a hole having an axis perpendicular to the surface of an object 19 to be formed can be formed. <P>COPYRIGHT: (C)2003,JPO</p> |
