| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a circuit pattern testing apparatus which facilitates convenient and rapid creation of a recipe, comparison and display of images, setting of test regions, or other operations. <P>SOLUTION: In the circuit pattern testing apparatus 1, when performing a test, with a created recipe applied to a plurality of wafers, the recipe is copied from one shelf number to another shelf number on a graphic screen display of a cassette wherein the wafers are held. A defect information file from another testing apparatus is retrieved, and based on the content of the file, a new recipe for the circuit pattern testing apparatus 1 is created. Moreover, from the results of merging of test results or overlapping of dies and shots, areas which require no test are assigned using graphics on the screen to create new test areas or change the test areas. <P>COPYRIGHT: (C)2003,JPO |
