AQUEOUS DISPERSION FOR CHEMICAL-MECHANICAL POLISHING, PREPARATION THEREOF AND CHEMICAL-MECHANICAL POLISHING METHOD USING THE SAME,申请号KR20030007387-传众专利搜索

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发明名称	AQUEOUS DISPERSION FOR CHEMICAL-MECHANICAL POLISHING, PREPARATION THEREOF AND CHEMICAL-MECHANICAL POLISHING METHOD USING THE SAME
摘要
申请公布号	KR20030067538(A)	申请公布日期	2003.08.14
申请号	KR20030007387	申请日期	2003.02.06
申请人		发明人
分类号	B24B37/00;C09G1/02;C01B33/18;C09K3/14;H01L21/304;H01L21/3105	主分类号	B24B37/00
代理机构		代理人
主权项
地址

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