METHOD FOR PREPARING GAS-TIGHT TERMINAL

摘要

A method for preparing a gas-tight terminal (30) having an opening of a cylindrical article (31) as an outer frame and, anodically bonded therewith, a peripheral portion of a flat glass plate (32), characterized in that a plane anodically bonded has a width of 0.04 mm to 200 mm and a surface roughness of 0.20 mum, the cylindrical article (31) comprises at least one metal of Fe, Ni and Co, an alloy comprising the metal as a main component, or an electroconductive ceramic, the glass plate (32) contains an alkali metal ion, and the portion having been bonded by anodic bonding exhibits a transmission of an inert gas of 1.0 x 10-15Pa . m3/s to 1.0 x 10-8Pa . m3/s. A gas-tight terminal (30) prepared by the method is a high vacuum gas-tight terminal which is highly reliable and can be produced at a low cost.